Probe cards measure DC and RF.

Two new Pyramid[R] Parametric Probe Cards allow single-pass DC and RF measurements during parametric production test for semiconductors with advanced process nodes at 65 nm, 45 nm, and beyond. The membrane manufacturing process provides 20-GHz transmission lines and guarded traces to the probe tip resulting in leakage performance to 1 fA with a 5-s settling time.

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Pyramid Plus technology enables probing of 30-[micro]m square pads with small scrub marks and uniform marking, yielding less particle generation. With MicroScrub, the same probe card can be used for both Cu and Al pads, and the permanent probe tip alignment and consistent low contact resistance extend the probe-card lifetime.

The Pyramid Probe Card is available in either DC only (PDC50) or DC plus RF (PRF50) configurations with options for pad size and leakage specifications. Cascade Micro-tech, www.rsleads.com/804ee-199